The decomposition products of sulfur hexafluoride (sf 6

Nov 01, 2007 · In Taiwan, the rapid growth in the integrated circuits (IC) manufacturing industry has resulted in the large uses of PFCs since mid-1990s. According to the survey data by TaiwanEnvironmental Protection Administration , the total use quantity of SF 6 was approximately 200 metric tonnes in 2002.2.3. Blanketing gasGet price

Decomposition of Sulfr hexafluoride in an RF Plasma Environment

duced the electron density and, thus, reduced the dis-sociation of SF 6 and inhibited the production of free radicals. However, when the input power exceeded 40 W, η insulating gas was not affected by the feed O 2 /SF 6 ratio, lead-ing to more than 99% decomposition. Reaction Products The major reaction products of the decomposition of SF 6 were SiF 4, SO 2, F 2, SO 2 F 2, SOF 2Get price

Mechanism of Formation of SF Decomposition Gas Products and

reaction of decomposition products with water and oxygen are shown in Fig. 2. It can be seen that the major products of the decomposition reaction are sulphur oxides, while others are fluoride compounds. The concentrations of decomposition products are directly dependent on spark conditions and energy. Figure 2. The formation of SF 6Get price

sf6 gas basic physical properties - AGC Chemicals

Density (gas) 6.04kg/m3 (25°C, 1atm) (liquid) 1,339kg/m3 (25°C) Vapor Pressure 1,264kPa (0°C) 2,109kPa (20°C) 3,327kPa (40°C) Surface Tension 8.02N/m (-20°C) Viscosity (gas) 1.5 x 10-5Pa・s (25°C, 1atm) (liquid) 27.7 x 10-5Pa・s (25°C) Refractive Index 1.000783 (0°C, 1atm) 0.408mL insulating gas/mL oil Solubility in Water 0.0063mL Sulfr hexafluoride/mL waterGet price

Theoretical study of the neutral decomposition of gaz sf6 in the

Aug 26, 2016 · In the presence of H 2 O and O 2, the dissociation products of SF 6 will decompose to form several main stable byproducts (i.e. SOF 2, SOF 4 and SO 2 F 2) in an electrical discharGet price

Adsorption of Sulfr hexafluoride decomposition components over Pd (1 1 1): A

Jan 28, 2019 · This work studies the adsorption properties of Pd(1 1 1) surface to various SF 6 decomposition components (H 2 S, SO 2, SOF 2, and SO 2 F 2).Due to the affluent active d electronic of Pd transition metal, the density functional theory has been used to analyze the adsorption properties of Pd(1 1 1) surface to H 2 S, SO 2, SOF 2, and SO 2 F 2, including the adsorption structures, adsorptionGet price

Decomposition characteristics of insulating gas under thermal fault for

This paper aims to explore the decomposition characteristics of insulating gas under thermal fault, which can further improve the method of using insulating gas decomposed components to diagnose inner insulation statusGet price


Jan 01, 2013 · Mixtures of sf6 gas and air after passage through a lighted cigarette tip were analyzed for SF5 decomposition products. The Sulfr hexafluoride concentration in the mixture ranged from 0.1% to 6.5%. The gaseous mixture in a 60 L mixing tank was drawn through the tip of the cigarette by a pump into a Tediar gas sampling bag.Get price

Thermal Decomposition Properties of Epoxy Resin in Sulfr hexafluoride - MDPI

The decomposition extent of epoxy resin in three mixed gases follows: 20% SF 6 /N 2 30% SF 6 /N 2 40% SF 6 /N 2, that is to say, in the mixture of 20% SF 6 /N 2, weight loss of epoxy resin was more severe than in the mixture of 40% SF 6 /N 2. Figure 1.Get price

CF 4 decomposition by thermal plasma processing | SpringerLink

Decomposition of CF4 was investigated by thermal plasma method. Thermal plasma processes applied to environmental problems have the features of high temperature, high activity and rapid decomposition rate, so it can perfectly decompose non-decomposed materials like CF4 to a high degree. Before the experiment, thermodynamic equilibrium calculations were performed from 300 K to 5,000 K atGet price

Sulfr hexafluoride decomposition components under different metallic free

The change rules of five main characteristic decomposition components, namely, CF 4, CO 2, SOF 2, SO 2 F 2, and SO 2, under different free‐conducting metal particles were obtained using gas chromatography–mass spectrometry quantitative detection.Get price

Thermodynamic properties and transport coefficients in SF 6

The density of SFz given by Bart1 [12], who took into account neither SF3 nor SF,, appears to us to be rather low. Hertz et nl [ 1 I] did not take account of SF, SFz, SF3, SF, or SF,. 2.2.4. Results for an Sulfr hexafluoride-Cu mixture. Figure 2 represents the composition of a plasma made up of 90% sF6 and 10% Cu from 1000 to 30000 K at 0.1 MPa.Get price

Adsorption mechanism of sf 6 decomposition components onto N

Sep 01, 2018 · In this paper, we proposed the application of N and F co-doped TiO 2 nanotubes acting as gas sensors in the detection of SF 6 decomposition components based on density functional theory method. We first calculated the adsorption process of SF 6 characteristic components on N and F co-doped anatase TiO 2 (1 0 1) surface (NF-TiO 2 ).Get price

The thermal decomposition kinetics of polysiloxane

The decomposition activation energy in N 2 and air were 147.405 kJ·monl −1 and 192.656 kJ·monl −1 respectively. This is a preview of subscription content, access via your institution . Access optionsGet price

Comparative Study of Materials to Sulfr hexafluoride Decomposition

Feb 07, 2017 · In order to judge the inside insulation fault of gaz sf6 insulated equipment, the gas-sensing properties to a series of characteristic Sulfr hexafluoride decomposition components, SOF2, SO2F2, SO2, H2S, CF4, HF, and insulating gas, have been studied. In this study, a comparative study of these gas-sensing materials has been made in theoretical and experimental fields to find the optimal gas-sensing material, and putGet price

Ni-CNT Chemical Sensor for Sulfr hexafluoride Decomposition Components

Oct 16, 2018 · However, insulation defects inevitably occur in SF 6-insulated equipment, which induces SF 6 to decompose into various decomposition components: SO 2, H 2 S, SOF 2, and SO 2 F 2 under electric discharge [4,5,6,7]. In addition, the existence of insulation defects and SF 6 decomposition dramatically reduce the insulation strength of SF 6-insulated equipment .Get price


DECOMPOSITION OF AGGREGATE ENERGY INTENSITY OF INDUSTRY WITH APPLICATION TO CHINA, KOREA AND TAIWAN B.W. Ang Department of Industrial and Systems Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore 1 19260. Tel: 65 - 772 2203 Fax: 65-777 1434 Email: [email protected]Get price

Whatthe Verdict on Taiwan Semiconductor Mfg. Co. Ltd.'s

Dec 09, 2014 · Intelhigh-density 14-nanometer SRAM cell size represents a 28.5% shrink from TSMC's. Not quite 35%, but itquite a bit better than the 15% that TSMC claims. The 16-nanometer claim appearsGet price

Taiwan’s Chemical Industry: Looking Back and Looking Ahead

tury, after the Qing Dynasty ceded Taiwan to Japan. In the era of Japanese occupation, which lasted from 1895 until 1945, Taiwan served as a base for the export of agricultural and industrial materials to Japan. After World War II, the Republic of China became the governing body of Taiwan and initiated an era of rapid industrialization. InGet price

Polymers | Free Full-Text | Thermal Decomposition Kinetics of

The last area corresponded to the slow decomposition of lignin and the final residue, and some carbon and ash were generated [35,36,37]. The two weightless peaks in Figure 1 of waste HDPE, with complex components, were the decomposition of wood fiber and HDPE. The main structure of HDPE was C-C as the main chain, and its pyrolysis process is aGet price

The decomposition of methyltrichlorosilane: Studies in a high

Experimental measurements of the decomposition of methyltrichlorosilane (MTS), a common silicon carbide precursor, in a high-temperature flow reactor are presented. The results indicate that methane and hydrogen chloride are major products of the decomposition. No chlorinated silane products were observed. Hydrogen carrier gas was found to increase the rate of MTS decomposition. TheGet price

Decomposition Chemistry of Tetraethoxysilane - Desu - 1989

The rate constant for the surface decomposition of the intermediate is 1.29 × 10 −6 exp[(– 12.26 kJ/mol)/RT]. This model successfully explains rate dependence on pressure and temperature. This model successfully explains rate dependence on pressure and temperature.Get price

Thermal decomposition of methyltrichlorosilane

1. Eur J Mass Spectrom (Chichester). 2014;20(5):409-17. Thermal decomposition of methyltrichlorosilane, dimethyldichlorosilane and methyldichlorosilane by flash pyrolysis vacuum ultraviolet photoionization time-of-flight mass spectrometry.Get price

Journal of Physics: Conference Series OPEN ACCESS Related

films deposited at lower temperature (table 1) shown a decrease in the film density. It is known a decrease in the Si-OH bonds in the film resulted in a more dense silicon oxide film [9, 10]. The refractive index has been reported to be inversely proportional both to etch rate and the number of hydroxyl groups in the film [9-11].Get price

Thermal decomposition of fluoropolymers and firing

Jun 23, 2005 · In this work, the thermal decomposition behaviors of three fluoropolymers have been investigated with differential thermal analysis/thermogravimetry and differential scanning calorimetry. The parameters concerning decomposition have been evaluated with a nonisothermal technique, and a suitable binder is suggested for the Zr/KClO 4 primingGet price

Effect of density on the thermal decomposition mechanism of ε

In addition, we studied the effect of density on the generation of clusters and the reaction kinetics of the thermal decomposition. The results indicate that the initial reaction pathway of the CL-20 molecule is the cleavage of the N-NO2 bond at different densities and that the frequency of N-NO2 bond breakage decreases at high density.Get price

wika sf6 safety precautions cart system

Industrial Sulfr hexafluoride Gas Pressure and Measurement Products - WIKA USA. 3. These decomposition products corrode metal, leading to equipment damage, more leaks, and serious safety hazards. Industrial SF 6 gas density equipment and services.Get price